JPH0542073Y2 - - Google Patents
Info
- Publication number
- JPH0542073Y2 JPH0542073Y2 JP1985085024U JP8502485U JPH0542073Y2 JP H0542073 Y2 JPH0542073 Y2 JP H0542073Y2 JP 1985085024 U JP1985085024 U JP 1985085024U JP 8502485 U JP8502485 U JP 8502485U JP H0542073 Y2 JPH0542073 Y2 JP H0542073Y2
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- flexible sheet
- support frame
- substrate
- storage container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 15
- 239000004033 plastic Substances 0.000 claims description 8
- 229920003023 plastic Polymers 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 2
- 239000000853 adhesive Substances 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 8
- 239000000428 dust Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000001459 lithography Methods 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985085024U JPH0542073Y2 (en]) | 1985-06-05 | 1985-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985085024U JPH0542073Y2 (en]) | 1985-06-05 | 1985-06-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61200383U JPS61200383U (en]) | 1986-12-15 |
| JPH0542073Y2 true JPH0542073Y2 (en]) | 1993-10-22 |
Family
ID=30635041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985085024U Expired - Lifetime JPH0542073Y2 (en]) | 1985-06-05 | 1985-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0542073Y2 (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0620911B2 (ja) * | 1986-12-27 | 1994-03-23 | 日本鉱業株式会社 | 半導体ウェーハー包装容器 |
| JP4497845B2 (ja) * | 2003-06-04 | 2010-07-07 | 旭化成イーマテリアルズ株式会社 | 大型ペリクルの収納方法 |
| WO2006059388A1 (ja) * | 2004-12-02 | 2006-06-08 | Asahi Kasei Emd Corporation | 大型ぺリクルの収納方法 |
-
1985
- 1985-06-05 JP JP1985085024U patent/JPH0542073Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61200383U (en]) | 1986-12-15 |
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